Silicon Tetrafluoride (ideal gas)	SiF4(g)	Si1F4(g)	Pankratz 1984 (B674)	[Formation: S(c,l) + 2F2 (g) = SiF4 (g)]			
T(K)	Cp (J/mol*K)	S (J/mol*K)	-[G-H(Tr)]/T (J/mol*K)	H-H(Tr) (kJ/mol*K)	delta-f H (kJ/mol*K)	delta-f G (kJ/mol*K)	log Kf
298.15	73.622	282.646	282.646	0.000	-1614.940	-1572.736	275.533
300	73.822	283.102	282.646	0.138	-1614.957	-1572.477	273.789
400	83.140	305.691	285.658	8.012	-1615.639	-1558.205	203.478
500	89.625	324.984	291.646	16.669	-1615.995	-1543.791	161.277
600	94.090	341.745	298.629	25.870	-1616.133	-1529.344	133.140
700	97.207	356.498	305.867	35.443	-1616.129	-1514.884	113.041
800	99.433	369.631	313.034	45.279	-1616.037	-1500.424	97.966
900	101.060	381.443	319.988	55.308	-1615.890	-1485.973	86.243
1000	102.282	392.154	326.674	65.480	-1615.710	-1471.517	76.863
1100	103.219	401.949	333.080	75.756	-1615.514	-1457.137	69.193
1200	103.951	410.965	339.201	86.115	-1615.304	-1442.756	62.801
1300	104.529	419.308	345.046	96.542	-1615.087	-1428.376	57.392
1400	104.997	427.073	350.632	107.018	-1614.890	-1414.016	52.757
1500	105.382	434.328	355.966	117.541	-1614.698	-1399.715	48.742
1600	105.696	441.140	361.083	128.093	-1614.522	-1385.394	45.228
1687	105.926	446.747	365.355	137.302	-1614.375	-1372.846	42.507
1687	105.926	446.747	365.355	137.302	-1664.927	-1372.846	42.507
1700	105.960	447.558	365.983	138.679	-1664.868	-1370.578	42.112
1800	106.186	453.621	370.686	149.285	-1664.445	-1353.273	39.270
1900	106.374	459.366	375.200	159.912	-1664.010	-1335.985	36.728
2000	106.537	464.826	379.547	170.557	-1663.592	-1318.763	34.442